| 其他摘要 | In 2013, Yunnan Observatories applied for establishing Yunnan Astronomical Applications Engineering Laboratory, it has been approved. In the current key technical issues to be solved, the optical components of the astronomical mirror surface shape detection is a priority. Commonly used detection method is divided into contact and non-contact. Currently the plant commonly used contact spherometer to detect coarse grinding optical mirror, this measurement method, although simple in principle, but due to the limited measurement points, coarse mesh, inefficient, but also because it is contact measurement, it is not suitable surface inspection for crystals soft lenses，and it will also scratches on the surface finish higher mirror in the testing process. Non-contact spherometer is very expensive, and in the early part of the optical grinding is not cost-effective. Therefore, the development of a set of relatively low-cost, scalable, high flexibility of the non-contact surface shape detection system to achieve automatic spherometer’s function, complete the optical mirror kibble detection is necessary.The hardware used KEYENCE LT-9031 high-precision laser measuring instrument, DANAHER ULTI-MAC-G controller and supporting two-dimensional mobile platforms and Zolix KSAV2030-ZF electronically controlled high-precision vertical lift to construct, and based on STM32 series controller chip designed controller to complete the instruction allocation and scheduling functions, the use of serial communication control x-axis / y-axis motion-dimensional translation stage to achieve grid scanning, the measurement based on laser scanning arc-shaped surface of high, but due to the principle of confocal microscopy measurement range is narrow, the acquisition of the z-axis to expand the measurement range of lifts, designed PC control program and the man-machine interface, making the system more flexible and convenient to use at later stage, coded the surface fitting algorithm, and ultimately realized the automatic acquisition of the optical surface shape data of the part, fitting, as well as the relevant optical parameters calculations.The experimental results show whether the test optical element surface gap exceeds the measurement range of the laser head, this thesis studied non-contact surface shape detection system can complete the required surface shape data collection, and give the relevant optical parameters after surface fitting. The system implements hardware and software, capable of a variety of optical element surface shaped one-touch automatic detection and precision can be achieved kibble detection, and low cost, not only meet the needs of my lab work, but also in line with market demand. |
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